11 Patents
- US125055312025System and Method of Generating a Modulation Map for a Spatial Light Modulator to Illuminate a Template Used in a Photomechanical Shaping System
CANON KABUSHIKI KAISHA
0 cites - US124986342025System and Method for Generating Control Values for Overlay Control of an Imprint Tool
Canon Kabushiki Kaisha
0 cites - US124630812025Apparatus Including a Bonding Head and a Method of Using the Same
CANON KABUSHIKI KAISHA
0 cites - US123668002025Method for Improving Accuracy of Imprint Force Application in Imprint Lithography
CANON KABUSHIKI KAISHA
0 cites - US123211032025System and Method of Generating a Set of Illumination Patterns for Use in a Photomechanical Shaping System
Canon Kabushiki Kaisha
0 cites - 0 cites
- US119947972024System and Method for Shaping a Film with a Scaled Calibration Measurement Parameter
CANON KABUSHIKI KAISHA
0 cites - US117768332023Method for Improving Accuracy of Imprint Force Application in Imprint Lithography
Canon Kabushiki Kaisha
0 cites - US117768402023Superstrate Chuck, Method of Use, and Method of Manufacturing an Article
Canon Kabushiki Kaisha
0 cites - 0 cites
- US116565462023Exposure Apparatus for Uniform Light Intensity and Methods of Using the Same
CANON KABUSHIKI KAISHA
0 cites