Patents/Inventors

Nikolay Pokrovskiy

Billerica, MAUS1 patent

2 Patents

US119815602024
Stress-isolated MEMS Device Comprising Substrate Having Cavity and Method of Manufacture
Analog Devices, Inc.
0 cites
US117460042023
Low-parasitic Capacitance MEMS Inertial Sensors and Related Methods
Analog Devices, Inc.
0 cites