Nikhil Dole

4 Patents

• US123225712025

  Multi-state RF Pulsing to Control Mask Shape and Breaking Selectivity Versus Process Margin Trade-off

  Lam Research Corporation

  0 cites
• US122781122025

  Multiple State Pulsing for High Aspect Ratio Etch

  Lam Research Corporation

  0 cites
• US122179722025

  Multi-state Pulsing for Achieving a Balance Between Bow Control and Mask Selectivity

  Lam Research Corporation

  0 cites
• US120209442024

  Method for Etching an Etch Layer

  Lam Research Corporation

  0 cites