7 Patents
- US124931802025Microelectromechanical Mirror Device with Piezoelectric Actuation Having Improved Stress Resistance
Stmicroelectronics S.r.l.
0 cites - US122925672025Microelectromechanical Mirror Device with Compensation of Planarity Errors
Stmicroelectronics S.r.l.
0 cites - US122420512025Microelectromechanical Mirror Device with Piezoelectric Actuation and Piezoresistive Sensing Having Self-calibration Properties
Stmicroelectronics S.r.l.
0 cites - US117876852023Process for Manufacturing an Optical Microelectromechanical Device Having a Tiltable Structure with an Antireflective Surface
Stmicroelectronics S.r.l.
0 cites - US116737992023Method of Processing a Wafer for Manufacturing an Oscillating Structure Such as a Micro-mirror
Stmicroelectronics S.r.l.
0 cites - US116565392023Microelectromechanical Device with a Structure Tiltable by Piezoelectric Actuation Having Improved Mechanical and Electrical Characteristics
Stmicroelectronics S.r.l.
0 cites - US116007652023Piezoelectric Actuator Having a Deformation Sensor and Fabrication Method Thereof
STMICROELECTRONICS S.r.l.
0 cites