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Inventors
Nicolaas Petrus Marcus Brantjes
Eindhoven
NL
1 patent
2 Patents
US12405539
2025
Substrate Support and Substrate Table
ASML Netherlands B.V.
0 cites
US11947266
2024
Method for Controlling a Manufacturing Process and Associated Apparatuses
ASML NETHERLANDS B.V.
0 cites