7 Patents
- US125395692026Grouping Features of Showerheads in Substrate Processing Systems
LAM RESEARCH CORPORATION
0 cites - 0 cites
- US123385312025Spatially Tunable Deposition to Compensate Within Wafer Differential Bow
Lam Research Corporation
0 cites - US122725912025Friction Stir Welding in Semiconductor Manufacturing Applications
Lam Research Corporation
0 cites - US120501122024Distance Measurement Between Gas Distribution Device and Substrate Support at High Temperatures
LAM RESEARCH CORPORATION
0 cites - US119461422024Spatially Tunable Deposition to Compensate Within Wafer Differential Bow
Lam Research Corporation
0 cites - 0 cites