Patents/Inventors

Nelson Felix

Slingerlands, NYUS12 patents

11 Patents

US125638172026
Integrating Gate-cuts and Single Diffusion Break Isolation Post-rmg Using Low-temperature Protective Liners
International Business Machines Corporation
0 cites
US123101002025
Dielectric Reflow for Boundary Control
International Business Machines Corporation
0 cites
US122610442025
Multi-layer Hardmask for Defect Reduction in EUV Patterning
International Business Machines Corporation
0 cites
US120193762024
Polymer Brush Adhesion Promoter with UV Cleavable Linker
INTERNATIONAL BUSINESS MACHINES CORPORATION
0 cites
US120211352024
Bottom Source/drain Etch with Fin-cut-last-vtfet
International Business Machines Corporation
0 cites
US118044012023
Spacer-defined Process for Lithography-etch Double Patterning for Interconnects
International Business Machines Corporation
0 cites
US116995922023
Inverse Tone Pillar Printing Method Using Organic Planarizing Layer Pillars
International Business Machines Corporation
0 cites
US116950592023
Bottom Source/drain Etch with Fin-cut-last-vtfet
International Business Machines Corporation
0 cites
US116812132023
EUV Pattern Transfer Using Graded Hardmask
International Business Machines Corporation
0 cites
US116825582023
Fabrication of Back-end-of-line Interconnects
International Business Machines Corporation
0 cites
US115437512023
Organic Photoresist Adhesion to Metal Oxide Hardmasks
International Business Machines Corporation
0 cites