Patents/Inventors

Neil Martin Paul Benjamin

Palo Alto, CAUS2 patents

3 Patents

US123680572025
Enhanced Closed Loop Gas Based Heat Exchange
Lam Research Corporation
0 cites
US122371552025
Magnetic Shielding for Plasma Sources
Lam Research Corporation
0 cites
US116767982023
Cooling for a Plasma-based Reactor
Lam Research Corporation
0 cites