Neil K. Colvin

5 Patents

• US124760852025

  Shielded Gas Inlet for an Ion Source

  Axcelis Technologies, Inc.

  0 cites
• US120515612024

  Fluorine Based Molecular Co-gas When Running Dimethylaluminum Chloride as a Source Material to Generate an Aluminum Ion Beam

  Axcelis Technologies, Inc.

  0 cites
• US117567722023

  System and Method for Extending a Lifetime of an Ion Source for Molecular Carbon Implants

  Axcelis Technologies, Inc.

  0 cites
• US116995632023

  Etching Aluminum Nitride or Aluminum Oxide to Generate an Aluminum Ion Beam

  Axcelis Technologies, Inc.

  0 cites
• US116995652023

  Fluorine Based Molecular Co-gas When Running Dimethylaluminum Chloride as a Source Material to Generate an Aluminum Ion Beam

  Axcelis Technologies, Inc.

  0 cites