Neil J. Bassom

3 Patents

• US125710882026

  High Incidence Angle Graphite for Particle Control with Dedicated Low Sputter Yield Ion Beam

  Axcelis Technologies, Inc.

  0 cites
• US121547632024

  Hydraulic Feed System for an Ion Source

  Axcelis Technologies, Inc.

  0 cites
• US117281402023

  Hydraulic Feed System for an Ion Source

  Axcelis Technologies, Inc.

  0 cites