Patents/Inventors

Neil Colvin

Merrimack, NHUS3 patents

4 Patents

US124976872025
Ion Implantation System and Method for Implanting Aluminum Using Non-fluorine-containing Halide Species or Molecules
Axcelis Technologies, Inc.
0 cites
US124630032025
High Temperature Ion Source
Axcelis Technologies, Inc.
0 cites
US121547632024
Hydraulic Feed System for an Ion Source
Axcelis Technologies, Inc.
0 cites
US117281402023
Hydraulic Feed System for an Ion Source
Axcelis Technologies, Inc.
0 cites