Patents/Inventors

Neil Bassom

Hamilton, MAUS11 patents

11 Patents

US125660642026
Twist and Tilt Verification Using Diffraction Patterns
Axcelis Technologies, Inc.
0 cites
US124760852025
Shielded Gas Inlet for an Ion Source
Axcelis Technologies, Inc.
0 cites
US124313322025
High Energy Implanter with Small Footprint
Axcelis Technologies, Inc.
0 cites
US121129182024
Dual Source Injector with Switchable Analyzing Magnet
Axcelis Technologies, Inc.
0 cites
US120515612024
Fluorine Based Molecular Co-gas When Running Dimethylaluminum Chloride as a Source Material to Generate an Aluminum Ion Beam
Axcelis Technologies, Inc.
0 cites
US118238582023
Dual Source Injector with Switchable Analyzing Magnet
Axcelis Technologies, Inc.
0 cites
US117987752023
Extended Lifetime Dual Indirectly-heated Cathode Ion Source
Axcelis Technologies, Inc.
0 cites
US117567722023
System and Method for Extending a Lifetime of an Ion Source for Molecular Carbon Implants
Axcelis Technologies, Inc.
0 cites
US116995632023
Etching Aluminum Nitride or Aluminum Oxide to Generate an Aluminum Ion Beam
Axcelis Technologies, Inc.
0 cites
US116995652023
Fluorine Based Molecular Co-gas When Running Dimethylaluminum Chloride as a Source Material to Generate an Aluminum Ion Beam
Axcelis Technologies, Inc.
0 cites
US115453302023
Ion Source with Multiple Bias Electrodes
Axcelis Technologies, Inc.
0 cites