Patents/Inventors

Natsumi Torii

MiyagiJP13 patents

5 Patents

US126032582026
Plasma Processing Apparatus and Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US122610272025
Plasma Processing Apparatus and Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US121658492024
Plasma Processing Apparatus and Etching Method
TOKYO ELECTRON LIMITED
0 cites
US121365412024
Wiring Abnormality Detection Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US116461812023
Plasma Processing Apparatus and Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites