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Inventors
Natsuki Hirata
Nagoya
JP
3 patents
3 Patents
US12557183
2026
Ceramic Heater and Method of Manufacturing the Ceramic Heater
NGK INSULATORS, Ltd.
0 cites
US12211726
2025
Member for Semiconductor Manufacturing Apparatus
NGK INSULATORS, Ltd.
0 cites
US12211729
2025
Member for Semiconductor Manufacturing Apparatus
NGK INSULATORS, Ltd.
0 cites