Patents/Inventors

Nathan Musselwhite

San Jose, CAUS4 patents

4 Patents

US125687812026
Selective Silicon Trim by Thermal Etching
Lam Research Corporation
0 cites
US124671472025
Vapor Cleaning of Substrate Surfaces
LAM RESEARCH CORPORATION
0 cites
US120805922024
Film Stack Simplification for High Aspect Ratio Patterning and Vertical Scaling
Lam Research Corporation
0 cites
US120401932024
Efficient Cleaning and Etching of High Aspect Ratio Structures
LAM RESEARCH CORPORATION
0 cites