Patents/Inventors

Naruaki Iida

KoshiJP9 patents

8 Patents

US125575912026
Linearly Moving Mechanism and Method of Suppressing Particle Scattering
TOKYO ELECTRON LIMITED
0 cites
US123914722025
Substrate Processing Apparatus and Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites
US123811022025
Substrate Processing Apparatus and Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites
US123680692025
Substrate Transfer Device Including Housing Provided with Fan
TOKYO ELECTRON LIMITED
0 cites
US121512552024
Coating Apparatus and Coating Method
TOKYO ELECTRON LIMITED
0 cites
US119786552024
Substrate Transfer Mechanism and Substrate Transferring Method
TOKYO ELECTRON LIMITED
0 cites
US117525152023
Coating Apparatus and Coating Method
TOKYO ELECTRON LIMITED
0 cites
US117053592023
Substrate Transfer Mechanism and Substrate Transferring Method
TOKYO ELECTRON LIMITED
0 cites