Patents/Inventors

Naoyuki Suzuki

FuchuJP4 patents

5 Patents

US123277442025
Substrate Transfer Device and Substrate Processing System
Tokyo Electron Limited
0 cites
US120338782024
Substrate Transfer Apparatus and Substrate Processing System
TOKYO ELECTRON LIMITED
0 cites
US119396652024
Film Thickness Measuring Apparatus and Film Thickness Measuring Method, and Film Forming System and Film Forming Method
TOKYO ELECTRON LIMTED
0 cites
US117640922023
Substrate Transfer Apparatus and Substrate Processing System
TOKYO ELECTRON LIMITED
0 cites
US116055472023
Temperature Measuring Mechanism, Temperature Measuring Method, and Stage Device
TOKYO ELECTRON LIMITED
0 cites