Patents/Inventors

Naoyuki Koizumi

NaganoJP1 patent

2 Patents

US118817942024
Electrostatic Adsorption Member and Substrate Fixing Device
SHINKO ELECTRIC INDUSTRIES CO., Ltd.
0 cites
US118482242023
Electrostatic Chuck and Substrate Fixing Device
SHINKO ELECTRIC INDUSTRIES CO., Ltd.
0 cites