Naoya Kida

3 Patents

• US124244212025

  Apparatus and Method for Controlling a Substrate Temperature

  NHK SPRING CO., Ltd.

  0 cites
• US123549012025

  Stage and Manufacturing Method Thereof

  NHK SPRING CO., Ltd.

  0 cites
• US120007372024

  Temperature Sensor and Heater Unit

  NHK SPRING CO., Ltd.

  0 cites