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Inventors
Naosuke Nishimura
Saitama
JP
2 patents
3 Patents
US12292681
2025
Imprint Method, Imprint Apparatus, and Method of Manufacturing Article
CANON KABUSHIKI KAISHA
0 cites
US12032283
2024
Imprint Apparatus and Method of Manufacturing Article
CANON KABUSHIKI KAISHA
0 cites
US11681237
2023
Lithography Apparatus and Method of Manufacturing Article
CANON KABUSHIKI KAISHA
0 cites