Patents/Inventors

Naoki Umeshita

TokyoJP3 patents

4 Patents

US124865752025
Apparatus for Processing Substrate, Gas Shower Head, and Method for Processing Substrate
Tokyo Electron Limited
0 cites
US124179282025
Substrate Processing Method and Substrate Processing System
TOKYO ELECTRON LIMITED
0 cites
US124068622025
Vacuum Processing Apparatus and Oxidizing Gas Removal Method
Tokyo Electron Limited
0 cites
US120117382024
Substrate Processing Method and Ionic Liquid
TOKYO ELECTRON LIMITED
0 cites