Patents/Inventors

Naoki Kiyohara

TokyoJP4 patents

4 Patents

US125478922026
Control Device, Lithography Apparatus, and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites
US123581872025
Imprint Mold, Imprint Method, and Manufacturing Method of Article
Canon Kabushiki Kaisha
0 cites
US121792312024
Planarization Method and Photocurable Composition
Canon Kabushiki Kaisha
0 cites
US117525192023
Planarization Method and Photocurable Composition
CANON KABUSHIKI KAISHA
0 cites