Nao Akashi

4 Patents

• US124282422025

  Information Processing Apparatus, Transfer Position Correction Method, and Substrate Processing Apparatus

  Tokyo Electron Limited

  0 cites
• US123676022025

  Information Processing Apparatus for Teaching Transfer Position of Substrate, Transfer Position Teaching Method, and Substrate Processing Apparatus Including the Information Processing Apparatus

  TOKYO ELECTRON LIMITED

  0 cites
• US122305232025

  Substrate Processing Apparatus and Image Capturing Method

  TOKYO ELECTRON LIMITED

  0 cites
• US115980072023

  Substrate State Determining Apparatus, Substrate Processing Apparatus, Model Generating Apparatus, and Substrate State Determining Method

  TOKYO ELECTRON LIMITED

  0 cites