4 Patents
- US120805922024Film Stack Simplification for High Aspect Ratio Patterning and Vertical Scaling
Lam Research Corporation
0 cites - US120401802024Nitride Films with Improved Etch Selectivity for 3D NAND Integration
Lam Research Corporation
0 cites - US118697702024Selective Deposition of Etch-stop Layer for Enhanced Patterning
Lam Research Corporation
0 cites - 0 cites