Patents/Inventors

Nagayasu Hiramatsu

Hillsboro, ORUS2 patents

3 Patents

US119843192024
Substrate Processing Method and Film Forming System
TOKYO ELECTRON LIMITED
0 cites
US117537192023
Flow Rate Control Method, Flow Rate Control Device, and Film Forming Apparatus
TOKYO ELECTRON LIMITED
0 cites
US116294042023
Method of Forming Tungsten Film and Controller
TOKYO ELECTRON LIMITED
0 cites