Patents/Inventors

Nader Shamma

Cupertino, CAUS5 patents

6 Patents

US124746402025
Integration of Dry Development and Etch Processes for EUV Patterning in a Single Process Chamber
Lam Research Corporation
0 cites
US124379952025
Tin Oxide Films in Semiconductor Device Manufacturing
Lam Research Corporation
0 cites
US124179162025
Tin Oxide Films in Semiconductor Device Manufacturing
Lam Research Corporation
0 cites
US123728722025
Extreme Ultraviolet (EUV) Lithography Using an Intervening Layer or a Multi-layer Stack with Varying Mean Free Paths for Secondary Electron Generation
LAM RESEARCH CORPORATION
0 cites
US123157272025
Eliminating Yield Impact of Stochastics in Lithography
Lam Research Corporation
0 cites
US120947112024
Tin Oxide Films in Semiconductor Device Manufacturing
Lam Research Corporation
0 cites