Patents/Inventors

Nadav Gutman

Zichron Ya′aqovIL12 patents

12 Patents

US125357442026
Overlay Estimation Based on Optical Inspection and Machine Learning
KLA Corporation
0 cites
US124238032025
Predicting Tool Induced Shift Using Moiré Overlay Targets
KLA Con
0 cites
US121005742024
Target and Algorithm to Measure Overlay by Modeling Back Scattering Electrons on Overlapping Structures
KLA Corporation
0 cites
US120929662024
Device Feature Specific Edge Placement Error (EPE)
KLA Corporation
0 cites
US120558592024
Overlay Mark Design for Electron Beam Overlay
0 cites
US120011482024
Enhancing Performance of Overlay Metrology
KLA Corporation
0 cites
US118625242024
Overlay Mark Design for Electron Beam Overlay
0 cites
US117200312023
Overlay Design for Electron Beam and Scatterometry Overlay Measurements
KLA Corporation
0 cites
US117037672023
Overlay Mark Design for Electron Beam Overlay
0 cites
US116982512023
Methods and Systems for Overlay Measurement Based on Soft X-ray Scatterometry
KLA Corporation
0 cites
US116370302023
Multi-stage, Multi-zone Substrate Positioning Systems
KLA Corporation
0 cites
US115927552023
Enhancing Performance of Overlay Metrology
KLA Corporation
0 cites