Patents/Inventors

Mária Péter

EindhovenNL8 patents

9 Patents

US124746292025
Membrane for EUV Lithography
ASML NETHERLANDS B.V.
0 cites
US122986632025
Method of Manufacturing a Pellicle for a Lithographic Apparatus, a Pellicle for a Lithographic Apparatus, a Lithographic Apparatus, a Device Manufacturing Method, an Apparatus for Processing a Pellicle, and a Method for Processing a Pellicle
ASML NETHERLANDS B.V.
0 cites
US121177262024
Pellicle and Pellicle Assembly
ASML NETHERLANDS B.V.
0 cites
US120667582024
Pellicle and Pellicle Assembly
ASML HOLDING N.V.
0 cites
US119716542024
Metal-silicide-nitridation for Stress Reduction
ASML NETHERLANDS B.V.
0 cites
US119472562024
Simultaneous Double-side Coating of Multilayer Graphene Pellicle by Local Thermal Processing
ASML NETHERLANDS B.V.
0 cites
US117622812023
Membrane for EUV Lithography
ASML NETHERLANDS B.V.
0 cites
US117549182023
Pellicle and Pellicle Assembly
ASML NETHERLANDS B.V.
0 cites
US116869972023
Metal-silicide-nitridation for Stress Reduction
ASML NETHERLANDS B.V.
0 cites