Patents/Inventors

Myung Seok Cha

SeoulKR10 patents

6 Patents

US126221982026
Exhausting Device and Exhausting Method in Substrate Processing Equipment
SEMES CO., Ltd.
0 cites
US124805952025
Anti Freeze Valve Apparatus and Semiconductor Processing Device Including the Same and Manufacturing Method Thereof
SEMES CO., Ltd.
0 cites
US123005172025
Apparatus for Treating Substrate and Temperature Control Method
SEMES CO., Ltd.
0 cites
US122781192025
Apparatus for Treating Substrate
SEMES CO., Ltd.
0 cites
US122725692025
Apparatus for Treating Substrate and Temperature Control Method
SEMES CO., Ltd.
0 cites
US120947052024
Substrate Treating Method and Substrate Treating Apparatus
SEMES CO., Ltd.
0 cites