Patents/Inventors

Myoungki Ahn

Yongin-siKR1 patent

2 Patents

US119729602024
Imaging Ellipsometry (ie)-based Inspection Method and Method of Fabricating Semiconductor Device by Using Ie-based Inspection Method
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US116246992023
Measurement System Capable of Adjusting AOI, AOI Spread and Azimuth of Incident Light
SAMSUNG ELECTRONICS CO., Ltd.
0 cites