6 Patents
- US124008252025Multi-electron Beam Image Acquisition Apparatus, Multi-electron Beam Inspection Apparatus, and Multi-electron Beam Image Acquisition Method
Nuflare Technology, Inc.
0 cites - 0 cites
- US118043612023Charged Particle Beam Writing Method, Charged Particle Beam Writing Apparatus, and Computer-readable Recording Medium
Nuflare Technology, Inc.
0 cites - US116948682023Multi-beam Image Acquisition Apparatus and Multi-beam Image Acquisition Method
Nuflare Technology, Inc.
0 cites - US116055232023Aberration Corrector and Multiple Electron Beam Irradiation Apparatus
Nuflare Technology, Inc.
0 cites - US115747932023Aberration Corrector and Multiple Electron Beam Irradiation Apparatus
Nuflare Technology, Inc.
0 cites