Patents/Inventors

Muhsin Eralp

Bethel, CTUS2 patents

3 Patents

US123990002025
Systems and Methods for Measuring Intensity in a Lithographic Alignment Apparatus
ASML Holding N.V.
0 cites
US118416262023
Alignment Sensor Based on Wavelength-scanning
ASML HOLDING N.V.
0 cites
US118031302023
Phase Modulators in Alignment to Decrease Mark Size
ASML Holding N.V.
0 cites