Patents/Inventors

Mu Feng

San Jose, CAUS7 patents

7 Patents

US124682322025
Etch Bias Characterization and Method of Using the Same
ASML NETHERLANDS B.V.
0 cites
US124431112025
Prediction Data Selection for Model Calibration to Reduce Model Prediction Uncertainty
ASML NETHERLANDS
0 cites
US123395912025
Determining Metrics for a Portion of a Pattern on a Substrate
ASML NETHERLANDS B.V.
0 cites
US119773362024
Method for Improving a Process for a Patterning Process
ASML NETHERLANDS B.V.
0 cites
US116752742023
Etch Bias Characterization and Method of Using the Same
ASML NETHERLANDS B.V.
0 cites
US116146902023
Methods of Tuning Process Models
ASML NETHERLANDS B.V.
0 cites
US115674132023
Method for Determining Stochastic Variation of Printed Patterns
ASML NETHERLANDS B.V.
0 cites