Patents/Inventors

Motoi Yamagata

TokyoJP2 patents

3 Patents

US123920262025
Method and Device for Substrate Processing
Tokyo Electron Limited
0 cites
US123157072025
Mounting Table Structure, Substrate Processing Apparatus, and Method of Controlling Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US121675422024
Method for Manufacturing Substrate with Sensor
Tokyo Electron Limited
0 cites