Patents/Inventors

Motohiro Takahashi

TokyoJP3 patents

3 Patents

US125735842026
Stage Device, Charged Particle Beam Device, and Vacuum Device
HITACHI HIGH-TECH CORPORATION
0 cites
US124696712025
Stage Apparatus and Charged Particle Beam Apparatus Including Stage Apparatus
HITACHI HIGH-TECH CORPORATION
0 cites
US124008262025
Charged Particle Beam Device
Hitachi High-tech Corporation
0 cites