Patents/Inventors

Motohiro Shiratani

TokyoJP7 patents

7 Patents

US125291442026
Composition, Method of Producing Substrate, and Polymer
JSR CORPORATION
0 cites
US123728692025
Method for Forming Resist Pattern and Radiation-sensitive Resin Composition
JSR CORPORATION
0 cites
US123325632025
Pattern-forming Method and Composition
JSR CORPORATION
0 cites
US120655342024
Composition, Method of Producing Substrate, and Polymer
JSR CORPORATION
0 cites
US117969122023
Radiation-sensitive Composition and Pattern-forming Method
JSR CORPORATION
0 cites
US117452162023
Method for Producing Film
JSR CORPORATION
0 cites
US116034802023
Composition for Underlayer Film Formation, Underlayer Film for Directed Self-assembled Film and Forming Method Thereof, and Directed Self-assembly Lithography Process
JSR CORPORATION
0 cites