4 Patents
- US124544912025Nitride Piezoelectric Body and MEMS Device Using Same
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
0 cites - US123080632025Ferroelectric Thin Film, Electronic Element Using Name, and Method for Manufacturing Ferroelectric Thin Film
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
0 cites - US119996152024Nitride Piezoelectric Body and MEMS Device Using Same
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
0 cites - US119689022024Piezoelectric Body and MEMS Device Using Same
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
0 cites