17 Patents
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- US121069362024Scanned Angled Etching Apparatus and Techniques Providing Separate Co-linear Radicals and Ions
Applied Materials, Inc.
0 cites - 0 cites
- 0 cites
- 0 cites
- US119674892024Apparatus and Techniques for Angled Etching Using Multielectrode Extraction Source
Applied Materials, Inc.
0 cites - 0 cites
- 0 cites
- US117156212023Scanned Angled Etching Apparatus and Techniques Providing Separate Co-linear Radicals and Ions
APPLIED Materials, Inc.
0 cites - 0 cites
- 0 cites
- 0 cites