6 Patents
- US121632242024Methods for Depositing a Conformal Metal or Metalloid Silicon Nitride Film
BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM
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- US117422002023Composition and Methods Using Same for Carbon Doped Silicon Containing Films
VERSUM MATERIALS US, LLC
0 cites - US117323512023Methods for Depositing a Conformal Metal or Metalloid Silicon Nitride Film and Resultant Films
Versum Materials US, LLC
0 cites - US116315802023Formulation for Deposition of Silicon Doped Hafnium Oxide as Ferroelectric Materials
Versum Materials US, LLC
0 cites - US116055352023Boron-containing Compounds, Compositions, and Methods for the Deposition of a Boron Containing Films
Versum Materials US, LLC
0 cites