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Inventors
Mohammadreza Hajiahmadi
Den Bosch
NL
2 patents
3 Patents
US12379670
2025
Substrate, Patterning Device and Metrology Apparatuses
ASML Netherlands B.V.
0 cites
US12112260
2024
Metrology Apparatus and Method for Determining a Characteristic of One or More Structures on a Substrate
ASML Netherlands B.V.
0 cites
US12105432
2024
Metrology Method and Associated Computer Product
ASML Netherlands B.V.
0 cites