Patents/Inventors

Mohammad Awad

HeidenheimDE2 patents

3 Patents

US122769162025
Drive Device, Optical System and Lithography Apparatus
Carl Zeiss SMT GmbH
0 cites
US122769172025
Mirror, in Particular for Microlithography
CARL ZEISS SMT GmbH
0 cites
US119019482024
Modulation Device, Control Device, Optical System, Lithography System and Method
Carl Zeiss SMT GmbH
0 cites