Patents/Inventors

Mohamed Swillam

Wilton, CTUS14 patents

14 Patents

US125851982026
Lithographic Apparatus, Multi-wavelength Phase-modulated Scanning Metrology System and Method
ASML HOLDING N.V.
0 cites
US124870812025
On Chip Wafer Alignment Sensor
ASML Holding N.V.
0 cites
US123990002025
Systems and Methods for Measuring Intensity in a Lithographic Alignment Apparatus
ASML Holding N.V.
0 cites
US123930462025
Metrology Systems, Coherence Scrambler Illumination Sources and Methods Thereof
ASML Holding N.V.
0 cites
US123065412025
Lithographic Apparatus, Metrology Systems, Illumination Switches and Methods Thereof
ASML Holding N.V. & ASML Netherlands B.V.
0 cites
US122982572025
Monolithic Particle Inspection Device
ASML Netherlands B.V.
0 cites
US122164142025
Self-referencing Integrated Alignment Sensor
ASML Holding N.V.
0 cites
US121408722024
Optical Designs of Miniaturized Overlay Measurement System
ASML Holding N.V.
0 cites
US121355052024
Spectrometric Metrology Systems Based on Multimode Interference and Lithographic Apparatus
ASML Holding N.V.
0 cites
US121241732024
Lithographic Apparatus, Metrology Systems, Illumination Sources and Methods Thereof
ASML Netherlands B.V. & ASML Holding N.V.
0 cites
US121241772024
Overlay Measurement System Using Lock-in Amplifier Technique
ASML Netherlands B.V.
0 cites
US120667622024
On Chip Sensor for Wafer Overlay Measurement
ASML Holding N.V. & ASML Netherlands B.V.
0 cites
US119948082024
Lithographic Apparatus, Metrology Systems, Phased Array Illumination Sources and Methods Thereof
ASML Holding N.V.
0 cites
US119661692024
Lithographic Apparatus, Metrology Systems, Phased Array Illumination Sources and Methods Thereof
ASML Holding N.V.
0 cites