Patents/Inventors

Mitsuya Utsuno

TachikawaJP6 patents

5 Patents

US121295482024
Method of Forming Structures Using a Neutral Beam
ASM IP Holding B.V.
0 cites
US121257002024
Method of Forming High Aspect Ratio Features
ASM IP Holding B.V.
0 cites
US116437242023
Method of Forming Structures Using a Neutral Beam
ASM IP Holding B.V.
0 cites
US116461972023
Method for Depositing Silicon-free Carbon-containing Film as Gap-fill Layer by Pulse Plasma-assisted Deposition
ASM IP Holding B.V.
0 cites
US116263162023
Method of Depositing Carbon-containing Material on a Surface of a Substrate, Structure Formed Using the Method, and System for Forming the Structure
ASM IP Holding B.V.
0 cites