Patents/Inventors

Mitsutoshi Ashida

NirasakiJP3 patents

4 Patents

US124445742025
Plasma Processing Apparatus, and Plasma Processing Method
Tokyo Electron Limited
0 cites
US122371572025
Plasma Measurement Method
Tokyo Electron Limited
0 cites
US118428862023
Plasma Processing Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US115695582023
Directional Coupler for Use in a Substrate Processing Apparatus, Where the Directional Coupler Includes a Coaxial Line Coupled to a Conductor on a Substrate
TOKYO ELECTRON LIMITED
0 cites