5 Patents
- US126107832026Substrate Transfer Apparatus, State Determination Method, and Computer Storage Medium
Tokyo Electron Limited
0 cites - US123480642025Control Device for Mobile Body, Control Method Therefor, and Mobile Body Including Determining a Failure of a Switching Unit When No Electrical Load Is Connected
Fuji Electric Co Ltd.
0 cites - US119202402024Substrate Processing Apparatus, State Determination Method and Computer-readable Recording Medium
TOKYO ELECTRON LIMITED
0 cites - 0 cites
- US116079662023Control Device for Mobile Body, Control Method Therefor, and Mobile Body
Fuji Electric Co., Ltd.
0 cites