Patents/Inventors

Mitsuru Kojima

HandaJP4 patents

4 Patents

US125387552026
Member for Semiconductor Manufacturing Apparatus
NGK INSULATORS, Ltd.
0 cites
US123745342025
Member for Semiconductor Manufacturing Apparatus
NGK INSULATORS, Ltd.
0 cites
US123004762025
Wafer Placement Table
NGK INSULATORS, Ltd.
0 cites
US122117252025
Electrostatic Chuck Assembly
NGK INSULATORS, Ltd.
0 cites