Patents/Inventors

Mitsunori Ohata

Taiwa-choJP14 patents

16 Patents

US125801532026
Balanced Resonator Source for Plasma Processing
Tokyo Electron Limited
0 cites
US124513292025
Plasma Processing Apparatus with Tunable Electrical Characteristic
TOKYO ELECTRON LIMITED
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US123946002025
Balanced RF Resonant Antenna System
Tokyo Electron Limited
0 cites
US123946292025
Plasma Processing Methods Using Low Frequency Bias Pulses
Tokyo Electron Limited
0 cites
US123745312025
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US123476462025
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US123476542025
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US123343132025
Plasma Processing Apparatus and Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US123004682025
Method of Uniformity Control
Tokyo Electron Limited
0 cites
US122304752025
Systems and Methods of Control for Plasma Processing
Tokyo Electron Limited
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US121835832024
Remote Source Pulsing with Advanced Pulse Control
Tokyo Electron Limited
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US121547612024
Plasma Processing Apparatus and Plasma Processing Method
TOKYO ELECTRON LIMITED
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US119729252024
Plasma Processing Apparatus and Plasma Processing Method
TOKYO ELECTRON LIMITED
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US119159102024
Fast Neutral Generation for Plasma Processing
TOKYO ELECTRON LIMITED
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US118172952023
Three-phase Pulsing Systems and Methods for Plasma Processing
TOKYO ELECTRON LIMITED
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US117987872023
Plasma Processing Apparatus and Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites