Patents/Inventors

Mitsuhiro Okazawa

YokohamaJP1 patent

2 Patents

US119086592024
Multi Charged Particle Beam Writing Apparatus
Nuflare Technology, Inc.
0 cites
US115747972023
Multiple-charged Particle-beam Irradiation Apparatus and Multiple-charged Particle-beam Irradiation Method
NUFLARE TECHNOLOGY, Inc.
0 cites