Patents/Inventors

Mir Homayoun Shahrjerdy

EindhovenNL1 patent

2 Patents

US124682352025
Method and Apparatus to Determine a Patterning Process Parameter
ASML NETHERLANDS B.V.
0 cites
US119472692024
Method and Apparatus to Determine a Patterning Process Parameter
ASML NETHERLANDS B.V.
0 cites