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Inventors
Minoru Harada
Tokyo
JP
3 patents
4 Patents
US12333695
2025
Sample Observation System and Image Processing Method
HITACHI HIGH-TECH CORPORATION
0 cites
US12260545
2025
Sample Observation Device and Method
Hitachi High-tech Corporation
0 cites
US12154264
2024
Defect Inspecting System and Defect Inspecting Method
HITACHI HIGH-TECH CORPORATION
0 cites
US11670528
2023
Wafer Observation Apparatus and Wafer Observation Method
HITACHI HIGH-TECH CORPORATION
0 cites